Dr. Byeri Yoon
at SAMSUNG SDI Chemicals & Electronic Materials
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Carbon, Optical lithography, Optical properties, Etching, Particles, Coating, Resistance, Scanning electron microscopy, Solids, Semiconductor manufacturing

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