Dr. Byong Chon Park
Principal Research Scientist at Korea Research Institute of Standards and Science
SPIE Involvement:
Author
Publications (16)

SPIE Journal Paper | August 26, 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Scanning electron microscopy, Line edge roughness, Carbon nanotubes, Atomic force microscope, Metrology, Atomic force microscopy, Standards development, Silicon, Manufacturing, Ion beams

PROCEEDINGS ARTICLE | April 18, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Calibration, Atomic force microscopy, Scanning electron microscopy, Spectroscopic ellipsometry, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Line edge roughness, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | March 25, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Metrology, Calibration, Error analysis, Atomic force microscopy, Near field scanning optical microscopy, Humidity, Solids, Feedback loops, Critical dimension metrology, Liquids

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Metrology, Silicon, Platinum, Atomic force microscopy, Scanning electron microscopy, Ion beams, Atomic force microscope, Line edge roughness, Standards development, Carbon nanotubes

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Fabrication, Carbon, Metrology, Ions, Atomic force microscopy, Scanning electron microscopy, Ion beams, 3D metrology, Critical dimension metrology, Carbon nanotubes

PROCEEDINGS ARTICLE | August 18, 2005
Proc. SPIE. 5879, Recent Developments in Traceable Dimensional Measurements III
KEYWORDS: Diffraction, Beam splitters, Metrology, Interferometers, Sensors, Calibration, Scanning electron microscopy, Atomic force microscope, Temperature metrology, Diffraction gratings

Showing 5 of 16 publications
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