Dr. Byong Chon Park
Principal Research Scientist at Korea Research Institute of Standards and Science
SPIE Involvement:
Publications (16)

SPIE Journal Paper | 26 August 2016 Open Access
Jinho Choi, Byong Chon Park, Sang Jung Ahn, Dal-Hyun Kim, Joon Lyou, Ronald Dixson, Ndubuisi Orji, Joseph Fu, Theodore Vorburger
JM3, Vol. 15, Issue 03, 034005, (August 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.3.034005
KEYWORDS: Scanning electron microscopy, Line edge roughness, Carbon nanotubes, Atomic force microscope, Metrology, Atomic force microscopy, Standards development, Silicon, Manufacturing, Ion beams

Proceedings Article | 18 April 2013 Paper
Proceedings Volume 8681, 86812K (2013) https://doi.org/10.1117/12.2011677
KEYWORDS: Extreme ultraviolet lithography, Semiconducting wafers, Line edge roughness, Extreme ultraviolet, Scanning electron microscopy, Atomic force microscopy, Spectroscopic ellipsometry, Photoresist processing, Calibration, Critical dimension metrology

Proceedings Article | 25 March 2008 Paper
B. C. Park, J. Choi, S. J. Ahn, M-j Shin, D-c Ihm, B-h Lee
Proceedings Volume 6922, 69222H (2008) https://doi.org/10.1117/12.773230
KEYWORDS: Calibration, Metrology, Critical dimension metrology, Liquids, Atomic force microscopy, Feedback loops, Near field scanning optical microscopy, Humidity, Error analysis, Solids

Proceedings Article | 5 April 2007 Paper
B. Park, J. Choi, S. Ahn, D-H Kim, J. Lyou, R. Dixson, N. Orji, J. Fu, T. Vorburger
Proceedings Volume 6518, 651819 (2007) https://doi.org/10.1117/12.712326
KEYWORDS: Silicon, Carbon nanotubes, Metrology, Atomic force microscopy, Standards development, Scanning electron microscopy, Line edge roughness, Ion beams, Atomic force microscope, Platinum

Proceedings Article | 24 March 2006 Paper
B. Park, S. Ahn, J. Choi, K. Jung, W. Song
Proceedings Volume 6152, 61520R (2006) https://doi.org/10.1117/12.656212
KEYWORDS: Atomic force microscopy, Scanning electron microscopy, Carbon nanotubes, Ion beams, Ions, Metrology, Critical dimension metrology, Carbon, Fabrication, 3D metrology

Showing 5 of 16 publications
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