Mr. Byoung Tak Jeon
Process Engineer at DongbuAnam Semiconductor
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Lithography, Optical lithography, Deep ultraviolet, Spectroscopy, Coating, Zinc, Transition metals, Photoresist materials, Head-mounted displays, Semiconducting wafers

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