Byung-Kap Kim
at Samsung Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 August 2001
Proc. SPIE. 4344, Metrology, Inspection, and Process Control for Microlithography XV
KEYWORDS: Microfluidics, Glasses, Image processing, Chromium, Control systems, Photomasks, Radiofrequency ablation, Critical dimension metrology, Photoresist processing, Phase shifts

Proceedings Article | 25 August 2000
Proc. SPIE. 4174, Micromachining and Microfabrication Process Technology VI
KEYWORDS: Bolometers, Infrared detectors, Microbolometers, Oxides, Vanadium, Infrared bolometers, Molecular bridges, Distortion, Bridges, Surface micromachining

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top