C. S. Premachandran
MEMS Technical Staff at A*STAR Institute of Microelectronics
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 13 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Packaging, Modulation, Metals, Copper, Silicon, Reliability, 3D modeling, Finite element methods, Semiconducting wafers, Back end of line

Proceedings Article | 28 February 2008
Proc. SPIE. 6886, Microfluidics, BioMEMS, and Medical Microsystems VI
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Optical coherence tomography, Etching, Silicon, Light scattering, Micromirrors, Deep reactive ion etching, Tissue optics

Proceedings Article | 13 February 2008
Proc. SPIE. 6886, Microfluidics, BioMEMS, and Medical Microsystems VI
KEYWORDS: Actuators, Microfluidics, Roads, Calibration, Blood, Silicon, Scientific research, Semiconducting wafers, Wafer bonding, Liquids

Proceedings Article | 8 February 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Mirrors, Tissues, Optical coherence tomography, Image processing, Silicon, Lens design, Optical fabrication, Micromirrors, Tissue optics, 3D image processing

Proceedings Article | 11 July 2007
Proc. SPIE. 6627, Optical Coherence Tomography and Coherence Techniques III
KEYWORDS: Microelectromechanical systems, Actuators, Endoscopy, GRIN lenses, Mirrors, Optical coherence tomography, Silicon, Micromirrors, Aluminum, 3D scanning

Showing 5 of 8 publications
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