Dr. Chun Chi Yu
Manager at United Microelectronics Corp
SPIE Involvement:
Author
Publications (42)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Lithography, Reticles, Data modeling, Visualization, Optical alignment, Optimization (mathematics), Semiconducting wafers, Data corrections, Overlay metrology

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Mathematical modeling, Stars, Data modeling, Scanners, Solids

Proceedings Article | 3 October 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Lithography, Modulation, Silicon, Photoresist materials, Finite element methods, Photomasks, Integrated optics, Molybdenum, Photoresist processing, Semiconducting wafers

Proceedings Article | 8 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Amorphous silicon, Lithography, Optical lithography, Etching, Image processing, Scanning electron microscopy, Signal processing, Photoresist processing, Semiconducting wafers, Overlay metrology

Proceedings Article | 23 October 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Lithography, Reticles, Image registration, Pellicles, Photomasks, Double patterning technology, Source mask optimization, Semiconducting wafers, Overlay metrology, 193nm lithography

Showing 5 of 42 publications
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