Dr. Caitlin Rouse Philippi
at TEL Technology Ctr America LLC
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 3 April 2020 Presentation + Paper
Proc. SPIE. 11329, Advanced Etch Technology for Nanopatterning IX
KEYWORDS: Carbon, Lithography, Optical lithography, Etching, Extreme ultraviolet lithography

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