Dr. Calvin C. Chang
Director at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | September 21, 2007
Proc. SPIE. 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
KEYWORDS: Diffraction, Beam splitters, Interferometers, Error analysis, Reliability, Interferometry, Phase interferometry, Profiling, 3D metrology, Phase shifts

PROCEEDINGS ARTICLE | September 11, 2007
Proc. SPIE. 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
KEYWORDS: Actuators, Beam splitters, Light sources, Interferometers, Calibration, Image processing, Interferometry, LCDs, 3D metrology, Charge-coupled devices

PROCEEDINGS ARTICLE | October 12, 2006
Proc. SPIE. 6382, Two- and Three-Dimensional Methods for Inspection and Metrology IV
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Light emitting diodes, Interferometry, Atomic force microscopy, Deconvolution, Charge-coupled devices, Algorithm development, Signal detection, Image deconvolution

PROCEEDINGS ARTICLE | August 14, 2006
Proc. SPIE. 6292, Interferometry XIII: Techniques and Analysis
KEYWORDS: Optical filters, Mirrors, Beam splitters, Light sources, Error analysis, Interferometry, Time metrology, Profiling, Objectives, Charge-coupled devices

PROCEEDINGS ARTICLE | August 31, 2005
Proc. SPIE. 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
KEYWORDS: Microelectromechanical systems, Light sources, Ferroelectric materials, Light emitting diodes, Silicon, Interferometry, Control systems, Atomic force microscopy, 3D metrology, Light

PROCEEDINGS ARTICLE | August 18, 2005
Proc. SPIE. 5879, Recent Developments in Traceable Dimensional Measurements III
KEYWORDS: Refractive index, Fabry–Perot interferometers, Ferroelectric materials, Fabry–Perot interferometry, Sensors, Atomic force microscopy, Head, Signal processing, Laser Doppler velocimetry, Liquids

Showing 5 of 9 publications
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