Large-scale micro-electromechanical systems (MEMS) scanning mirrors play a primary role in many fields of
manipulating light beam scanning, such as rapid optical spectrum analyzers (OSAs) based on dispersive gratings using in
near infrared (NIR) region. According to the applications, a high speed electromagnetically actuated MEMS scanning
mirror with large mirror area of 9×6mm<sup>2</sup> has been developed. The MEMS scanning mirror chip, which is fabricated
using bulk silicon micromachining process and electroplating technique, is immersed in a constant 365 mT magnetic
field parallel to the coil plane and generates the maximum optical deflection angle of ±11.15° at the 1.39 kHz resonant
frequency. The quality factor, Q, of 77 is achieved in air corresponding to a low power consumption of 102.6 mW. In
addition, the surface roughness of less than 20nm for scanning mirror has been measured and the optical reflectivity at
the wavelength of 1550nm is high up to 87%. The results show that the device is adequate for mm-sized scanning
systems and compatible with smart OSAs applications.
A 3 x 3 order matrix formalism for describing dispersion system conveniently is achieved by introducing an angular dispersion term based on ABCD matrix formalism. The matrix formalism is used to compute the second and third order time dispersion of the aberration-free stretcher. The same conclusion as the one achieved using the way of routine integral and ray trace is obtained. It is proven that computing the time delay dispersion of any dispersion systems using matrix formalism not only is convenient but also can offer more information about systems. In addition, this way is suitable for any dispersion systems.