Dr. Cari F. Herrmann
Research Associate at Univ of Colorado Boulder
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Microelectromechanical systems, Switches, Spectroscopy, Dielectrics, Mercury, Zinc, Capacitance, Atomic layer deposition, Aluminum, Zinc oxide

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5720, Micromachining Technology for Micro-Optics and Nano-Optics III
KEYWORDS: Microelectromechanical systems, Mirrors, Multilayers, X-rays, Silicon, Coating, Reflectivity, Atomic layer deposition, Micromirrors, Aluminum

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