Ms. Carla Victoria Cher
at Royal Melbourne Institute of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 29, 2004
Proc. SPIE. 5275, BioMEMS and Nanotechnology
KEYWORDS: Microfluidics, Etching, Polymers, Glasses, Ultraviolet radiation, Silicon, Aluminum, Plasma etching, Polymer thin films, Plasma

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