Dr. Carlo Fanara
at Ian Botan
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 8 April 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Light sources, Data modeling, Capillaries, Photodiodes, Multiplexing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

Proceedings Article | 6 July 2006
Proc. SPIE. 6273, Optomechanical Technologies for Astronomy
KEYWORDS: Polishing, Atmospheric plasma, Etching, Argon, Chemical species, Silicon carbide, Fluorine, Optics manufacturing, Surface finishing, Plasma

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