Dr. Carmen Popescu
Research Associate at Irresistible Materials Ltd
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 5 April 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Lithography, Opacity, Molecules, Chemistry, Photoresist materials, Extreme ultraviolet lithography, Critical dimension metrology, Line edge roughness, Stochastic processes, Chemically amplified resists

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Carbon, Etching, Silicon, Resistance, Fullerenes

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Opacity, Photoresist materials, Line width roughness, Extreme ultraviolet lithography, Line edge roughness, Chemically amplified resists

Proceedings Article | 16 October 2019 Presentation
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Electron beam lithography, Opacity, Scanners, Photoresist materials, Line width roughness, Extreme ultraviolet lithography, High volume manufacturing, Stochastic processes, Photoresist developing, Chemically amplified resists

Proceedings Article | 25 March 2019 Presentation + Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Optical lithography, Molecules, Scanning electron microscopy, Line width roughness, Extreme ultraviolet lithography, Critical dimension metrology, Line edge roughness, Nonmetals, Antimony, Stochastic processes

Showing 5 of 13 publications
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