Dr. Carola Bläsing
at Carl Zeiss SMT GmbH
SPIE Involvement:
Publications (11)

Proceedings Article | 9 September 2013 Paper
D. Beyer, C. Bläsing, K. Boehm, S. Heisig, D. Seidel
Proceedings Volume 8880, 88801W (2013) https://doi.org/10.1117/12.2026178
KEYWORDS: Calibration, Metrology, Error analysis, Photomasks, Image registration, Overlay metrology, Distance measurement, Manufacturing, 193nm lithography, Optical alignment

Proceedings Article | 2 April 2011 Paper
Dirk Beyer, Norbert Rosenkranz, Carola Blaesing-Bangert
Proceedings Volume 7985, 79850D (2011) https://doi.org/10.1117/12.896892
KEYWORDS: Photomasks, Metrology, Image registration, Semiconducting wafers, Overlay metrology, Manufacturing, Mask making, Pellicles, Lithography, Double patterning technology

Proceedings Article | 20 October 2006 Paper
Gunter Antesberger, Sven Knoth, Frank Laske, Jens Rudolf, Eric Cotte, Benjamin Alles, Carola Bläsing, Wolfgang Fricke, Klaus Rinn
Proceedings Volume 6349, 63491M (2006) https://doi.org/10.1117/12.686089
KEYWORDS: Error analysis, Reticles, Distortion, Calibration, Photomasks, Image registration, Statistical analysis, Ceramics, Statistical methods, Interferometers

Proceedings Article | 1 August 2002 Paper
Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476920
KEYWORDS: Photomasks, Critical dimension metrology, Metrology, Optical testing, Image registration, Semiconducting wafers, Lithography, Mirrors, Objectives, Resolution enhancement technologies

Proceedings Article | 5 September 2001 Paper
Proceedings Volume 4409, (2001) https://doi.org/10.1117/12.438331
KEYWORDS: Deep ultraviolet, Metrology, Critical dimension metrology, Photomasks, Edge detection, Imaging systems, Lithographic illumination, Optical resolution, Ultraviolet radiation, Environmental sensing

Showing 5 of 11 publications
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