Carolin Peter
Ph.D. Student at Fraunhofer-IPM
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 5, 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Optical fibers, Gas sensors, Light emitting diodes, Waveguides, Sensors, Polymers, Fiber optics sensors, Electronic circuits, Waveguide sensors, Absorption

PROCEEDINGS ARTICLE | May 5, 2011
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Gas sensors, Light emitting diodes, Waveguides, Sensors, Polymers, Glasses, Gases, NOx, Carbon monoxide, Toxic gases

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Modulation, Etching, Silicon, Resistance, Platinum, Photoresist materials, Aluminum, Reactive ion etching, Semiconducting wafers, Temperature metrology

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