Carolien Boeckx
at imec
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Metrology, Algorithm development, Software development, Data modeling, Image processing, Semiconductors, Scanning electron microscopy, Image analysis, Data analysis, Process control

Proceedings Article | 18 March 2016 Paper
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Directed self assembly, Extreme ultraviolet, Optical lithography, Lithography, Extreme ultraviolet lithography, Logic, Scanners, Etching, Immersion lithography, Stochastic processes, Personal protective equipment, Photomasks, Scanning electron microscopy, Metrology

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