Carolyn F. H. Gondran
at SEMATECH Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 July 2003
Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing
KEYWORDS: Lithography, Contamination, Statistical analysis, Metals, Copper, Silicon, Aluminum, Chemical analysis, Semiconducting wafers, Hybrid fiber optics

Proceedings Article | 15 July 2003
Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing
KEYWORDS: Electron beams, Electronics, Etching, Metals, Copper, Silicon, Resistance, Scanning electron microscopy, Ion beams, Semiconducting wafers

Proceedings Article | 30 July 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Wafer-level optics, Optical components, Lithography, Mirrors, Reticles, Contamination, Objectives, Semiconducting wafers, Failure analysis, Fiber optic illuminators

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top