Ms. Carolyn D. White Profile

Carolyn D. White

at Univ of California Berkeley

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Author

Publications (4)

Proceedings Article | 16 January 2003 Paper

Dynamic MEMS devices for multiaxial fatigue and elastic modulus measurement

Carolyn White, Rui Xu, Xiaotian Sun, Kyriakos Komvopoulos

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.476332

KEYWORDS: Microelectromechanical systems, Resonators, Scanning electron microscopy, Photomicroscopy, Material characterization, Silicon, Nonlinear response, Ion beams, Finite element methods, Microscopes

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Proceedings Article | 2 October 2001 Paper

Design for reliability of MEMS/MOEMS for lightwave telecommunications

Susanne Arney, Vladimir Aksyuk, David Bishop, Cristian Bolle, Robert Frahm, Arman Gasparyan, C. Randy Giles, Suresh Goyal, Flavio Pardo, Herbert Shea, Michael Lin, Carolyn White

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.442996

KEYWORDS: Microopto electromechanical systems, Reliability, Microelectromechanical systems, Packaging, Telecommunications, Networks, Silicon, Physics, Mechanical engineering, Feedback loops

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Proceedings Article | 10 August 2000 Paper

Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages

Herbert Shea, Arman Gasparyan, Carolyn White, Robert Comizzoli, David Abusch-Magder, Susanne Arney

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395700

KEYWORDS: Electrodes, Humidity, Silicon, Microelectromechanical systems, Reliability, Oxides, Etching, Scanning electron microscopy, HF etching, Oxidation

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Proceedings Article | 10 August 2000 Paper

Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures

Carolyn White, Herbert Shea, Kimberly Cameron, Flavio Pardo, Cristian Bolle, Vladimir Aksyuk, Susanne Arney

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395697

KEYWORDS: Resistance, Microelectromechanical systems, Reliability, Humidity, Environmental sensing, Environmental monitoring, Thin films, Electrical breakdown, Electrical phenomena, Semiconducting wafers

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