Carolyn D. White
at Univ of California Berkeley
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 16 January 2003
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Microscopes, Resonators, Silicon, Scanning electron microscopy, Ion beams, Finite element methods, Photomicroscopy, Material characterization, Nonlinear response

Proceedings Article | 2 October 2001
Proc. SPIE. 4558, Reliability, Testing, and Characterization of MEMS/MOEMS
KEYWORDS: Microelectromechanical systems, Packaging, Silicon, Reliability, Networks, Physics, Telecommunications, Microopto electromechanical systems, Feedback loops, Mechanical engineering

Proceedings Article | 10 August 2000
Proc. SPIE. 4180, MEMS Reliability for Critical Applications
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Electrodes, Silicon, Reliability, Scanning electron microscopy, Humidity, HF etching, Oxidation

Proceedings Article | 10 August 2000
Proc. SPIE. 4180, MEMS Reliability for Critical Applications
KEYWORDS: Microelectromechanical systems, Thin films, Environmental monitoring, Reliability, Resistance, Humidity, Semiconducting wafers, Environmental sensing, Electrical phenomena, Electrical breakdown

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