Carsten Hartig
Principal Member Technical Staff at GLOBALFOUNDRIES Dresden Module One GmbH
SPIE Involvement:
Publications (20)

Proceedings Article | 26 May 2022 Paper
Proceedings Volume 12053, 120531B (2022)
KEYWORDS: Process modeling, Process control, Metrology, Calibration, Semiconducting wafers, Neodymium, Error analysis, Control systems, Semiconductors, Machine learning

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116112D (2021)
KEYWORDS: Metrology, Bridges, Manufacturing, Data modeling, Time metrology, Semiconducting wafers, Reticles, Internet, Design for manufacturability, Data integration

Proceedings Article | 22 March 2018 Presentation + Paper
Peter Ebersbach, Adam Urbanowicz, Dmitriy Likhachev, Carsten Hartig, Michael Shifrin
Proceedings Volume 10585, 1058514 (2018)
KEYWORDS: Metrology, Semiconducting wafers, Data modeling, Machine learning, Data processing, Etching, Optics manufacturing, Wafer-level optics, Manufacturing, Process control

Proceedings Article | 13 March 2018 Presentation + Paper
S. Lozenko, T. Shapoval, G. Ben-Dov, Z. Lindenfeld, B. Schulz , L. Fuerst, C. Hartig, R. Haupt, M. Ruhm, R. Wang
Proceedings Volume 10585, 105851E (2018)
KEYWORDS: Scatterometry, Overlay metrology, Semiconducting wafers, Diffraction, Diffraction gratings, Computer simulations, Manufacturing, Data modeling, Critical dimension metrology

Proceedings Article | 28 March 2017 Presentation + Paper
Carsten Hartig, Bernd Schulz, Robert Melzer, Matthias Ruhm, Daniel Fischer, Stefan Buhl, Boris Habets, Martin Rößiger, Manuela Gutsch
Proceedings Volume 10145, 101450U (2017)
KEYWORDS: Electrical breakdown, Semiconducting wafers, Critical dimension metrology, Overlay metrology, Computer simulations, Lithography, Metals, Optical lithography, Feature extraction, Distance measurement

Showing 5 of 20 publications
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