Dr. Cecile Petitdidier
at Commissariat à l'Energie Atomique
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 May 2007
Proc. SPIE. 6591, Nanotechnology III
KEYWORDS: Thin films, Lithography, Polymethylmethacrylate, Polymers, Glasses, Silicon, Silicon films, Microelectronics, Polymer thin films, Temperature metrology

Proceedings Article | 2 April 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Optical lithography, Signal attenuation, Polymers, Glasses, Chemical analysis, Critical dimension metrology, Photoresist processing, Resist chemistry, Temperature metrology

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