Cedric Breluzeau
at Univ Paris-Sud II
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | June 21, 2006
Proc. SPIE. 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
KEYWORDS: Microelectromechanical systems, Microresonators, Modulation, Resonators, Reflection, Calibration, Silicon, Vibrometry, Phase measurement, Motion measurement

PROCEEDINGS ARTICLE | August 29, 2005
Proc. SPIE. 5858, Nano- and Micro-Metrology
KEYWORDS: Optical filters, Fringe analysis, Anisotropic filtering, Modulation, Microscopy, Fourier transforms, Interferometry, Phase shift keying, Demodulation, Binary data

PROCEEDINGS ARTICLE | June 13, 2005
Proc. SPIE. 5856, Optical Measurement Systems for Industrial Inspection IV
KEYWORDS: Microelectromechanical systems, Microscopes, Light sources, Etching, Microscopy, Silicon, Interferometry, 3D metrology, Objectives, Phase measurement

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