Dr. Cedric Rolin
Senior Researcher at imec
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3012691
KEYWORDS: Sustainability, Etching, Semiconductor manufacturing, Chemical mechanical planarization, Carbon, Atomic layer deposition, Nanostructures, Deposition processes, Very large scale integration, Vacuum

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12958, 129580L (2024) https://doi.org/10.1117/12.3012753
KEYWORDS: Etching, Chemistry, Gases, Silica, Sustainability, Optical lithography, Fluorine, Dry etching, Climate change, Semiconducting wafers

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12499, 124990F (2023) https://doi.org/10.1117/12.2662857
KEYWORDS: Etching, Carbon, Hydrogen, Lithography, Scanners, Semiconductors, Sustainability

Proceedings Article | 1 August 2021 Presentation
Proceedings Volume 11808, 1180810 (2021) https://doi.org/10.1117/12.2593010

Proceedings Article | 28 March 2021 Presentation
Xavier Rottenberg, Denis Marcon, Roelof Jansen, Bruno Figeys, Kristof Lodewijks, Anabel De Proft, Philippe Helin, Veronique Rochus, Cedric Rolin, Eleonora Storace, Robert Gehlhaar, Jan Genoe, Haris Osman, Paul Heremans, Philippe Soussan, Sandeep Saseendran, Aleksandrs Marinins, Bart Vereecke, Nga Pham, Deniz Tezcan
Proceedings Volume 11765, 117650G (2021) https://doi.org/10.1117/12.2584260
KEYWORDS: Visible radiation, Near infrared, Wafer-level optics, Sensing systems, Waveguides, Structured light, Scanners, Reflectivity, Quartz, Plasmonics

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top