Dr. Cedrick Chappaz
at Commissariat à l''''Energie Atomique
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Actuators, Mirrors, Optical lithography, Etching, Electrodes, Dielectrics, Silicon, Wavefronts, Deformable mirrors, Semiconducting wafers

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