Dr. Celesta E. White
Associate Research Engineer
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Polymers, Silicon, Microfluidics, Manufacturing, Lithography, Microelectromechanical systems, Scanning electron microscopy, Semiconducting wafers, Etching, Microsystems

Proceedings Article | 14 May 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Polymers, Microfluidics, Microelectromechanical systems, Optical lithography, Crystals, Fabrication, Promethium, Glasses, Semiconducting wafers, Lithography

Proceedings Article | 24 July 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Polymers, Microfluidics, Glasses, Carbonates, Fabrication, Microelectromechanical systems, Complex systems, Silicon, Integration, Dielectrics

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