Chad Rue
at Thermo Fisher Scientific Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Statistical analysis, 3D acquisition, Etching, Image processing, Scanning electron microscopy, 3D metrology, Shape analysis, Scanning transmission electron microscopy, 3D image processing

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