Extreme Ultraviolet (EUV) Lithography is still viewed as the most promising approach for maintaining the pace of
Moore's Law. Recent real achievements in EUV Lithography (EUVL) have encouraged semiconductor manufacturers to
reconsider their road maps. One of the principal challenges in the ongoing EUVL implementation for high volume
manufacturing (HVM) is the availability of necessary clean at wavelength metrology tools.
EUV Tech is the world's leading manufacturer of at-wavelength EUV metrology equipment. Founded in 1997, EUV
Tech has pioneered the development of several stand-alone inspection, metrology, and calibration tools for EUV
lithographic applications that can be operated in a clean room environment on the floor of a fab.
In this paper, EUV Tech’s R&D program to minimize particle adders in our EUV Reflectometer along with the ongoing
effort to enhance the reflectivity and wavelength, precision and accuracy required to qualify the EUV masks for HVM.
In addition to preliminary results from our stand alone EUV Scatterometer developed to characterize the phase roughness
of a EUV mask and the introduction of EUV Tech’s Pellicle test suite for testing EUV pellicles.