Chami Perera
VP Operations at EUV Tech
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | September 12, 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Metrology, Line width roughness, Scanning electron microscopy, Digital filtering, Atomic force microscopy, Standards development, Semiconductors, Image acquisition, Image quality, Electron microscopes

PROCEEDINGS ARTICLE | September 4, 2015
Proc. SPIE. 9661, 31st European Mask and Lithography Conference
KEYWORDS: Lithography, Metrology, Sensors, Particles, Reflectivity, Pellicles, Reflectometry, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

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