Dr. Chan-Uk Jeon
Vice President at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (61)

Proceedings Article | 26 September 2019
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Lithography, Optical lithography, Modulation, Ecosystems, Data processing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Data corrections

Proceedings Article | 3 October 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Reticles, Optical lithography, Coating, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Yield improvement

Proceedings Article | 16 October 2017
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Modulation, Data processing, Photomasks, Computer aided design

Proceedings Article | 16 October 2017
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Scanners, Inspection, Pellicles, Transmittance, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing

Proceedings Article | 13 July 2017
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Lithography, Databases, Inspection, Data processing, Photomasks

Showing 5 of 61 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top