Dr. Chan Hwang
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (20)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Metrology, Data modeling, Computing systems, Physics, Optical alignment, Semiconducting wafers, Nanofabrication, Overlay metrology, Instrument modeling

PROCEEDINGS ARTICLE | March 24, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Diffraction, Metrology, Polarization, Optical properties, Image processing, Inspection, Physics, Computer simulations, Process control, Detection theory, Semiconducting wafers, Overlay metrology, Diffraction gratings, Accuracy assessment

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Diffraction, Metrology, Image processing, Optical testing, Scatterometry, Optical metrology, Critical dimension metrology, Semiconducting wafers, Scatter measurement, Wafer testing, Overlay metrology, Device simulation, Diffraction gratings

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Diffraction, Electronics, Statistical analysis, Metals, Image processing, Error analysis, Semiconducting wafers, Statistical modeling, Overlay metrology, Chemical mechanical planarization

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Semiconductors, Lithography, Electronics, Scanners, Fourier transforms, Control systems, Process control, Semiconducting wafers, Overlay metrology, Instrument modeling

PROCEEDINGS ARTICLE | April 3, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Lithography, Data modeling, Scanners, Distortion, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Data corrections, Overlay metrology

Showing 5 of 20 publications
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