Dr. Chandana Yellampalli
Research Student at Indian Institute of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 January 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Oxides, Etching, Crystals, Silicon, Diffusion, Oxygen, Semiconducting wafers, Anisotropic etching, Surface finishing, Oxidation

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