Dr. Chandra Saru Saravanan
Principal Scientist at Onto Innovation Inc
SPIE Involvement:
Publications (5)

Proceedings Article | 1 April 2008 Paper
Proceedings Volume 6924, 69241M (2008) https://doi.org/10.1117/12.776783
KEYWORDS: Scatterometry, Double patterning technology, Optical proximity correction, 3D modeling, 3D metrology, Lithography, Critical dimension metrology, Scatter measurement, Overlay metrology, Metrology

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6922, 69222W (2008) https://doi.org/10.1117/12.775811
KEYWORDS: Semiconducting wafers, Overlay metrology, Diffraction, Scatterometry, Spectroscopy, Diffraction gratings, Photomasks, Silicon, Reflectivity, Optical alignment

Proceedings Article | 22 March 2008 Paper
Proceedings Volume 6922, 69220C (2008) https://doi.org/10.1117/12.774736
KEYWORDS: Overlay metrology, Double patterning technology, Silicon, Scatterometry, Optical lithography, Diffraction, Spectroscopy, Critical dimension metrology, Photoresist materials, Metrology

Proceedings Article | 4 April 2007 Paper
Chandra Saru Saravanan, Srinivasan Nirmalgandhi, Oleg Kritsun, Alden Acheta, Richard Sandberg, Bruno La Fontaine, Harry Levinson, Kevin Lensing, Mircea Dusa, Jan Hauschild, Anita Pici
Proceedings Volume 6518, 651806 (2007) https://doi.org/10.1117/12.712470
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Scanners, Scatterometry, Finite element methods, Monochromatic aberrations, Reticles, Cadmium, Fused deposition modeling, Mathematical modeling

Proceedings Article | 26 March 2007 Paper
Oleg Kritsun, Bruno La Fontaine, Richard Sandberg, Alden Acheta, Harry Levinson, Kevin Lensing, Mircea Dusa, Jan Hauschild, Anita Pici, Chandra Saravanan, Kunie Primak, Rahul Korlahalli, Srinivasan Nirmalgandhi
Proceedings Volume 6520, 65200L (2007) https://doi.org/10.1117/12.715971
KEYWORDS: Semiconducting wafers, Scanners, Scatterometry, Critical dimension metrology, Metrology, Lithography, Modulation transfer functions, Cadmium, Spatial frequencies, Immersion lithography

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