Prof. Chang-Hwan Choi
SDL Author at Stevens Institute of Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 4, 2011
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Lithography, Nanostructures, Mirrors, Tunable lasers, Interferometers, Silicon, Scanning electron microscopy, Photoresist materials, Semiconducting wafers, Laser systems engineering

PROCEEDINGS ARTICLE | May 12, 2009
Proc. SPIE. 7318, Micro- and Nanotechnology Sensors, Systems, and Applications
KEYWORDS: Nanotechnology, Microscopes, Nanostructures, Nanostructuring, Etching, Luminescence, Silicon, Control systems, Scanning electron microscopy, Nanolithography

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