Dr. Chang-Moon Lim
Research Fellow at SK Hynix Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (54)

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Optical lithography, Extreme ultraviolet lithography, Semiconducting wafers, Etching, Extreme ultraviolet, Critical dimension metrology, Image processing, Failure analysis, Scanning electron microscopy, Image analysis

Proceedings Article | 26 March 2019 Presentation
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Failure analysis, Critical dimension metrology, Metrology, Extreme ultraviolet lithography, Printing, Semiconducting wafers

Proceedings Article | 2 May 2018 Presentation + Paper
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Nanoimprint lithography, Lithographic illumination, Photomasks, Fiber optic illuminators, Diffraction, Extreme ultraviolet lithography, Reticles, Printing, Semiconducting wafers, Optical lithography

Proceedings Article | 1 May 2018 Presentation + Paper
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Photomasks, Semiconducting wafers, Critical dimension metrology, Extreme ultraviolet, Stochastic processes, Diffraction, Compact discs, Diffraction gratings, Cadmium, Lithographic illumination

Proceedings Article | 5 May 2017 Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Nanoimprint lithography, Photomasks, Stochastic processes, Diffraction, Extreme ultraviolet lithography, Optical lithography, Lithographic illumination, Scanners, Immersion lithography, Stray light, Extreme ultraviolet, Calibration, Fiber optic illuminators, Contamination

Showing 5 of 54 publications
Conference Committee Involvement (10)
Optical and EUV Nanolithography XXXV
27 February 2022 | San Jose, California, United States
International Conference on Extreme Ultraviolet Lithography 2021
26 September 2021 | Monterey, California, United States
Extreme Ultraviolet (EUV) Lithography XII
22 February 2021 | Online Only, California, United States
Extreme Ultraviolet (EUV) Lithography XI
24 February 2020 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography X
25 February 2019 | San Jose, California, United States
Showing 5 of 10 Conference Committees
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