Dr. Chang-Soo Han
at Korea Institute of Machinery & Materials
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 29, 2004
Proc. SPIE. 5275, BioMEMS and Nanotechnology
KEYWORDS: Electrodes, Metals, Particles, Dielectrics, Silicon, Dielectrophoresis, Atomic force microscopy, Single walled carbon nanotubes, Nanolithography, Carbon nanotubes

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