Dr. Chang-woo Kang
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | June 30, 2012
Proc. SPIE. 8441, Photomask and Next-Generation Lithography Mask Technology XIX
KEYWORDS: Neck, Lithography, Scattering, Databases, Data processing, Distributed computing, Extreme ultraviolet, Optical proximity correction, Binary data, Electronic design automation

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