Chang Han Je
Researcher at ETRI
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Sensors, Etching, Electrodes, Resistance, Capacitance, Deep reactive ion etching, Bulk micromachining

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