Mr. Chang Won Jung
PhD Student at Univ of California Irvine
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 29, 2004
Proc. SPIE. 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Oxides, Switches, Electrodes, Copper, Dielectrics, Silicon, Oxygen, Photoresist materials, Capacitance

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