Dr. Changgeng Liu
Senior Scientist at Geospace Research Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 23 January 2006 Paper
Proceedings Volume 6112, 61120G (2006) https://doi.org/10.1117/12.646049
KEYWORDS: Microfluidics, Liquids, Coating, Polymethylmethacrylate, Manufacturing, Silicon, Photoresist materials, Resistance, Diffusion, Biosensors

Proceedings Article | 22 January 2005 Paper
Changgeng Liu, Yifan Qiu, Kun Lian
Proceedings Volume 5718, (2005) https://doi.org/10.1117/12.590859
KEYWORDS: Polymers, Microfluidics, Biomedical optics, Liquids, Molecules, Fabrication, Sensors, Polymerization, Chemical species, Magnetism

Proceedings Article | 22 January 2005 Paper
Proceedings Volume 5718, (2005) https://doi.org/10.1117/12.592244
KEYWORDS: Microfluidics, Lithography, Semiconducting wafers, Photomasks, Silicon, Neodymium, Polymers, Liquids, Ultraviolet radiation, Wafer bonding

Proceedings Article | 16 January 2003 Paper
Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478197
KEYWORDS: Temperature metrology, Photoresist materials, Microelectromechanical systems, Ultraviolet radiation, Microopto electromechanical systems, Epoxies, Polymerization, Lithography, Thermal analysis, Particles

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