Dr. Changgeng Liu
Senior Scientist at Geospace Research Inc
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6112, Microfluidics, BioMEMS, and Medical Microsystems IV
KEYWORDS: Microfluidics, Polymethylmethacrylate, Silicon, Diffusion, Coating, Manufacturing, Resistance, Biosensors, Photoresist materials, Liquids

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5718, Microfluidics, BioMEMS, and Medical Microsystems III
KEYWORDS: Lithography, Microfluidics, Polymers, Ultraviolet radiation, Silicon, Photomasks, Neodymium, Semiconducting wafers, Wafer bonding, Liquids

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5718, Microfluidics, BioMEMS, and Medical Microsystems III
KEYWORDS: Fabrication, Microfluidics, Biomedical optics, Sensors, Chemical species, Polymers, Molecules, Magnetism, Polymerization, Liquids

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Lithography, Ultraviolet radiation, Particles, Photoresist materials, Microopto electromechanical systems, Thermal analysis, Polymerization, Epoxies, Temperature metrology

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