Changmin Lee
at Yonsei Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 17 November 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Etching, Argon, Dry etching, Chromium, Emission spectroscopy, Photomasks, Plasma etching, Critical dimension metrology, Chlorine, Plasma

Proceedings Article | 3 November 2016
Proc. SPIE. 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
KEYWORDS: Electronics, Optical lithography, Nanoparticles, Metals, Particles, Copper, Silver, Manufacturing, Analytical research, Laser sintering

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top