Prof. Changqing Xie
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (17)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Multilayers, Argon, Sputter deposition, Crystals, Ions, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum

PROCEEDINGS ARTICLE | September 19, 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Diffraction, Reflection, Interferometers, X-rays, X-ray diffraction, Silicon, Optical fabrication, Synchrotron radiation, X-ray astronomy, Diffraction gratings

PROCEEDINGS ARTICLE | August 23, 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Gold, Lithography, Electron beam lithography, Diffraction, Spectroscopy, X-rays, X-ray diffraction, X-ray lithography, Diffraction gratings

SPIE Journal Paper | August 19, 2017
JM3 Vol. 16 Issue 03
KEYWORDS: X-rays, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, X-ray characterization, Nanofabrication, Diffraction gratings, Photomasks, Diffraction

SPIE Journal Paper | March 5, 2013
OE Vol. 52 Issue 03
KEYWORDS: X-rays, X-ray lithography, Gold, Silicon carbide, X-ray diffraction, Electron beam lithography, X-ray optics, Laser welding, Diffraction gratings, Lithography

PROCEEDINGS ARTICLE | January 12, 2009
Proc. SPIE. 7133, Fifth International Symposium on Instrumentation Science and Technology

Showing 5 of 17 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top