Prof. Changqing Xie
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Multilayers, Argon, Sputter deposition, Crystals, Ions, Silicon, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Molybdenum

Proceedings Article | 19 September 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Diffraction, Reflection, Interferometers, X-rays, X-ray diffraction, Silicon, Optical fabrication, Synchrotron radiation, X-ray astronomy, Diffraction gratings

Proceedings Article | 23 August 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Gold, Lithography, Electron beam lithography, Diffraction, Spectroscopy, X-rays, X-ray diffraction, X-ray lithography, Diffraction gratings

SPIE Journal Paper | 19 August 2017
JM3 Vol. 16 Issue 03
KEYWORDS: X-rays, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, X-ray characterization, Nanofabrication, Diffraction gratings, Photomasks, Diffraction

SPIE Journal Paper | 5 March 2013
OE Vol. 52 Issue 03
KEYWORDS: X-rays, X-ray lithography, Gold, Silicon carbide, X-ray diffraction, Electron beam lithography, X-ray optics, Laser welding, Diffraction gratings, Lithography

Showing 5 of 17 publications
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