Prof. Changsi Peng
Senior Researcher at Tampere Univ
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | October 22, 2010
Proc. SPIE. 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: GRIN lenses, Lithography, Modulation, Silica, Gallium arsenide, Laser applications, Photonic crystals, Atomic force microscopy, Semiconducting wafers, Nanolithography

PROCEEDINGS ARTICLE | February 24, 2009
Proc. SPIE. 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
KEYWORDS: Lithography, Electron beam lithography, Mirrors, Beam splitters, Optical lithography, Laser processing, Control systems, Photoresist materials, Pulsed laser operation, Laser systems engineering

PROCEEDINGS ARTICLE | May 8, 2008
Proc. SPIE. 6997, Semiconductor Lasers and Laser Dynamics III
KEYWORDS: Tunable lasers, Quantum wells, Semiconductor optical amplifiers, Coarse wavelength division multiplexing, Etching, Semiconductor lasers, Ion beams, Iodine, Photonic integrated circuits, Temperature metrology

PROCEEDINGS ARTICLE | November 19, 2007
Proc. SPIE. 6782, Optoelectronic Materials and Devices II
KEYWORDS: Indium gallium arsenide, Quantum wells, Annealing, Gallium arsenide, Diffusion, Nitrogen, Heat treatments, Laser damage threshold, Gallium, Absorption

PROCEEDINGS ARTICLE | June 25, 2007
Proc. SPIE. 6593, Photonic Materials, Devices, and Applications II
KEYWORDS: Fabrication, Thin films, Lithography, Beam splitters, Optical lithography, Laser applications, Laser ablation, Photoresist materials, Laser crystals, Nanolithography

PROCEEDINGS ARTICLE | June 12, 2007
Proc. SPIE. 6593, Photonic Materials, Devices, and Applications II
KEYWORDS: Nanotechnology, Lithography, Electron beam lithography, Beam splitters, Optical lithography, Laser applications, Control systems, Scanning probe lithography, Nanolithography, Laser systems engineering

Showing 5 of 12 publications
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