Prof. Changsi Peng
Senior Researcher at Tampere Univ
SPIE Involvement:
Publications (12)

Proceedings Article | 22 October 2010
Proc. SPIE. 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Gallium arsenide, GRIN lenses, Silica, Modulation, Nanolithography, Laser applications, Lithography, Photonic crystals, Semiconducting wafers, Atomic force microscopy

Proceedings Article | 24 February 2009
Proc. SPIE. 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
KEYWORDS: Lithography, Laser systems engineering, Optical lithography, Electron beam lithography, Photoresist materials, Laser processing, Pulsed laser operation, Control systems, Beam splitters, Mirrors

Proceedings Article | 8 May 2008
Proc. SPIE. 6997, Semiconductor Lasers and Laser Dynamics III
KEYWORDS: Etching, Ion beams, Semiconductor optical amplifiers, Photonic integrated circuits, Coarse wavelength division multiplexing, Quantum wells, Semiconductor lasers, Temperature metrology, Tunable lasers, Iodine

Proceedings Article | 19 November 2007
Proc. SPIE. 6782, Optoelectronic Materials and Devices II
KEYWORDS: Quantum wells, Gallium arsenide, Annealing, Gallium, Indium gallium arsenide, Nitrogen, Heat treatments, Absorption, Diffusion, Laser damage threshold

Proceedings Article | 25 June 2007
Proc. SPIE. 6593, Photonic Materials, Devices, and Applications II
KEYWORDS: Beam splitters, Fabrication, Optical lithography, Lithography, Nanolithography, Laser ablation, Photoresist materials, Laser crystals, Thin films, Laser applications

Showing 5 of 12 publications
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