Dr. Changyi Yang
at Univ of Melbourne
SPIE Involvement:
Conference Chair | Editor | Author
Publications (7)

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Oxides, Sensors, Chemical species, Electrodes, Ions, Silicon, Diffusion, Photomasks, Phosphorus, Quantum communications

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Sensors, Silicon, Quantum dots, Photomasks, Ion implantation, Transistors, Field effect transistors, Phosphorus, Lead, Quantum computing

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Sensors, Electrodes, X-rays, Ions, Silicon, Capacitance, Ionization, Ion implantation, Molybdenum, Acoustics

PROCEEDINGS ARTICLE | November 13, 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Oxides, Sensors, Electrodes, X-rays, Ions, Silicon, Ion implantation, Signal detection, Quantum communications, Quantum computing

PROCEEDINGS ARTICLE | November 19, 2001
Proc. SPIE. 4590, BioMEMS and Smart Nanostructures
KEYWORDS: Fabrication, Thin films, Polymethylmethacrylate, Etching, Ions, Silicon, Atomic force microscopy, Nanolithography, Quantum computing, Carbon nanotubes

Showing 5 of 7 publications
Conference Committee Involvement (1)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
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