Dr. Chanmin Su
Director of Technology at Bruker Nano Inc
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | April 18, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Electron beams, Metrology, Capillaries, Video, Image resolution, Control systems, Atomic force microscopy, Servomechanisms, Feedback control, Semiconducting wafers

PROCEEDINGS ARTICLE | April 6, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Metrology, Modulation, Scanners, Silicon, Image resolution, Atomic force microscopy, Transmission electron microscopy, Extreme ultraviolet, Associative arrays, Semiconducting wafers

PROCEEDINGS ARTICLE | August 28, 2010
Proc. SPIE. 7764, Nanoengineering: Fabrication, Properties, Optics, and Devices VII
KEYWORDS: Microelectromechanical systems, Gold, Oxides, Doppler effect, Sensors, Calibration, Electrodes, Silicon, Single walled carbon nanotubes, Electric field sensors

PROCEEDINGS ARTICLE | May 22, 2009
Proc. SPIE. 7378, Scanning Microscopy 2009
KEYWORDS: Actuators, Imaging systems, Nanoparticles, Scanners, Error analysis, Inspection, Control systems, Atomic force microscopy, Scanning probe microscopy, Feedback control

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