Dr. Chantal G. Khan-Malek
at DERCI
SPIE Involvement:
Author
Publications (26)

Proceedings Article | 21 November 2001 Paper
Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II
KEYWORDS: Microelectromechanical systems, Lithography, Polymethylmethacrylate, Microsystems, X-rays, Manufacturing, Photomasks, Synchrotron radiation, Microfabrication, X-ray lithography

Proceedings Article | 6 April 2001 Paper
Proc. SPIE. 4234, Smart Materials
KEYWORDS: Microelectromechanical systems, Polymethylmethacrylate, X-rays, Manufacturing, Printing, Photoresist materials, Micromachining, Photoresist processing, Semiconducting wafers, X-ray lithography

Proceedings Article | 1 September 2000 Paper
Proc. SPIE. 4075, Micro-Opto-Electro-Mechanical Systems
KEYWORDS: Gold, Optical components, Lithography, Etching, Ions, Ion beams, Micromachining, Zone plates, X-ray lithography, Optics manufacturing

Proceedings Article | 21 July 2000 Paper
Proc. SPIE. 3997, Emerging Lithographic Technologies IV
KEYWORDS: Gold, Lithography, Electron beam lithography, Etching, Metals, X-rays, Ion beams, Iodine, Micromachining, Zone plates

Proceedings Article | 10 April 2000 Paper
Proc. SPIE. 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS
KEYWORDS: Lithography, Polymethylmethacrylate, Polymers, Metals, X-rays, Electrons, Interfaces, Plating, Photoresist processing, Adhesives

Showing 5 of 26 publications
Conference Committee Involvement (8)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
10 December 2008 | Melbourne, Australia
Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
5 December 2007 | Canberra, ACT, Australia
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
11 December 2006 | Adelaide, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
12 December 2005 | Brisbane, Australia
Smart Sensors, Actuators, and MEMS II
9 May 2005 | Sevilla, Spain
Showing 5 of 8 Conference Committees
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