Chao Jung Chen
Senior Engineer at SMIC
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Lithography, Optical lithography, Silica, Etching, Dielectrics, Coating, Scanning electron microscopy, Plasma etching, Semiconducting wafers, Plasma

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