Chao Jung Chen
Senior Engineer at SMIC
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 January 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Etching, Silica, Plasma etching, Plasma, Optical lithography, Semiconducting wafers, Lithography, Coating, Dielectrics, Scanning electron microscopy

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