Dr. Chao Fang Profile

Dr. Chao Fang

at Yangtze Memory Technologies Co Ltd

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Publications (1)

Proceedings Article | 20 March 2020 Paper

Enhancing the applications space of diffraction based overlay metrology by increasing throughput and target pitch flexibility

Simon Mathijssen, Herman Heijmerikx, Farzad Farhadzadeh, Marc Noot, Lineke van der Sneppen, Longfei Shen, Fei Jia, Jolly Xu, Huajun Qin, Arie den Boef, Elliott Mc Namara, Kaustuve Bhattacharyya, Chao Fang, Yaobin Feng

Proceedings Volume 11325, 113252L (2020) https://doi.org/10.1117/12.2551899

KEYWORDS: Diffraction, Overlay metrology, Metrology, Diffraction gratings, Semiconducting wafers, Polarization, Silicon, Detection and tracking algorithms

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