Dr. Charles Kin P. Cheung
at National Institute of Standards and Technology
SPIE Involvement:
Conference Program Committee | Author
Publications (1)

PROCEEDINGS ARTICLE | January 19, 2005
Proc. SPIE. 5592, Nanofabrication: Technologies, Devices, and Applications
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Thin films, Sensors, Electrodes, Metals, Silicon, Aluminum, Semiconducting wafers

Conference Committee Involvement (2)
Nanofabrication: Technologies, Devices, and Applications II
23 October 2005 | Boston, MA, United States
Nanofabrication: Technologies, Devices, and Applications
25 October 2004 | Philadelphia, Pennsylvania, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top